Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools
Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools
复制标题
金刚石刀具加工单晶硅时冷却液对刀具磨损的影响
DOI：
10.4028/www.scientific.net/kem.389-390.144
复制
发表时间：
2008
期刊：
影响因子：
--
通讯作者：
T. Kuriyagawa
中科院分区：
文献类型：
--
作者：
T. Ohta;Jixin Yan;S. Kodera;Shuuma Yajima;N. Horikawa;Youichi Takahashi;T. Kuriyagawa
在切割单晶硅时，金刚石刀具的使用寿命通常很短，因为刀具磨损严重。因此，为了抑制刀具磨损，使用合适的冷却液是很重要的。通过对切削力和刀具磨损几何形状的研究，比较了油基和水基冷却液在硅片加工中的性能。研究发现，水基冷却液比油基冷却液更能有效地抑制后刀面磨损。使用水基刀具的有效刀具寿命平均是使用油基刀具的三倍。刀具磨损机制可能与切割过程中硅与金刚石之间产生的微等离子体有关。
The service life of a diamond tool in cutting single-crystal silicon is normally very short because of severe tool wear. Therefore, it is important to use a proper coolant in order to restrain tool wear. In this paper, the performances of oil-based and water-based coolants were compared in silicon machining by investigating cutting forces and tool wear geometries. The water-based coolant was found to restrain flank wear more effectively than the oil-based one. The effective tool life using the water-based one was averagely three times longer than that using the oil-based one. The tool wear mechanism might be related to microplasma generated between silicon and diamond during cutting.
从生物中学到的摩擦学
DOI：
--
发表时间：
2015
期刊：
日本ゴム協会誌
影响因子：
--
作者：
山下和也;安藤明博;酒徳唱太;澤剛生;木下俊哉;木下俊哉;山下和也;木下俊哉;山口哲生，赤峯彰，澤江義則
通讯作者：
山口哲生，赤峯彰，澤江義則
影响因子：
5
作者：
Yan, JW;Syoji, K;Tamaki, J
通讯作者：
Tamaki, J