A 1 k-Pixel Video Camera for 0.7-1.1 Terahertz Imaging Applications in 65-nm CMOS
A 1 k-Pixel Video Camera for 0.7-1.1 Terahertz Imaging Applications in 65-nm CMOS
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DOI：
10.1109/jssc.2012.2217851
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发表时间：
2012-12-01
影响因子：
5.4
通讯作者：
Pfeiffer, Ullrich R.
中科院分区：
文献类型：
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作者：
Al Hadi, Richard;Sherry, Hani;Pfeiffer, Ullrich R.
一款用于室温下主动太赫兹视频记录的1k像素摄像头芯片已完全集成到65 nm CMOS体工艺技术中。32x32像素阵列由1024个差分片上环形天线组成，这些天线耦合到NMOS直接探测器，基于分布式电阻自混合原理，运行良好-超过了它们的截止频率。它包括行和列选择以及积分和转储电路，能够捕获高达500fps的太赫兹视频。该相机芯片与一个41.7分贝的硅透镜(测量频率为856 GHz)一起封装在一个5x5x3厘米(3)的相机模块中。它是为连续波照明设计的(不需要锁定技术)。在这种视频模式下，相机的运行速度高达500fps。在856 GHz时，它的响应度R-v约为115千伏/瓦(包括5分贝VGA增益)和大约12 NW的总噪声当量功率(总噪声当量功率)在其500-kHz视频带宽上集成。在5 kHz斩波频率(非视频模式)下，单个像素可以提供140千伏/瓦(包括5分贝VGA增益)，在856 GHz时最小噪声等效功率(NEP)为100 PW/根赫兹。宽带天线和像素设计实现了至少790-960 GHz的3分贝带宽。
A 1 k-pixel camera chip for active terahertz video recording at room-temperature has been fully integrated in a 65-nm CMOS bulk process technology. The 32x32 pixel array consists of 1024 differential on-chip ring antennas coupled to NMOS direct detectors operated well-beyond their cutoff frequency based on the principle of distributed resistive self-mixing. It includes row and column select and integrate-and-dump circuitry capable of capturing terahertz videos up to 500 fps. The camera chip has been packaged together with a 41.7-dBi silicon lens (measured at 856 GHz) in a 5x5x3 cm(3) camera module. It is designed for continuous-wave illumination (no lock-in technique required). In this video-mode the camera operates up to 500 fps. At 856 GHz it achieves a responsivity R-v of about 115 kV/W (incl. a 5-dB VGA gain) and a total noise equivalent power (NEPtotal) of about 12 nW integrated over its 500-kHz video bandwidth. At a 5-kHz chopping frequency (non-video mode) a single pixel can provide a maximum responsivity R-v of 140 kV/W (incl. a 5-dB VGA gain) and a minimum noise equivalent power (NEP) of 100 pW/root Hz at 856 GHz. The wide-band antenna and pixel design achieves a 3-dB bandwidth of at least 790-960 GHz.