Numerical and experimental study on ultrasonic vibration-assisted micro-channelling of glasses using an abrasive slurry jet

Numerical and experimental study on ultrasonic vibration-assisted micro-channelling of glasses using an abrasive slurry jet
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使用磨料浆料射流超声振动辅助玻璃微通道的数值和实验研究

DOI:
10.1016/j.ijmecsci.2016.03.013
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发表时间:
2016-05-01
影响因子:
7.3
通讯作者:
Li, Gang
Li, Gang
中科院分区:
工程技术1区
文献类型:
--
作者:
Qi, Huan;Wen, Donghui;Li, Gang

文献摘要

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本文介绍了超声振动辅助磨料浆射流在玻璃表面形成微沟道的过程,并对该过程进行了数值模拟和实验研究。采用计算流体动力学(CFD)中的动网格技术对ASJ流场进行了数值模拟,探讨了超声振动对滞止区、颗粒碰撞速度和碰撞角度以及粘性流引起的冲蚀过程的影响。研究发现,在超声振动的辅助下,滞止区的静压、颗粒的冲击速度和冲击角度呈周期性变化,从而影响玻璃ASJ微沟道加工的材料去除过程。仿真结果还表明,在低压ASJ微细加工过程中,超声振动有利于粘性流的冲蚀。在此基础上,利用ASJ对玻璃进行了一系列超声振动辅助微沟道加工实验,以评价其对玻璃主要微沟道加工性能的影响。结果表明,在相同实验条件下,与传统ASJ微沟道加工相比,超声振动辅助ASJ微沟道加工提高了材料去除率、沟道深度和沟道顶部宽度,减小了沟道壁倾角。然而,通道底部的表面质量似乎不受超声波振动的显著影响。这些实验结果与相应的模拟结果相当吻合。(C)2016爱思唯尔有限公司版权所有
The ultrasonic-vibration assisted micro-channelling process on glasses by an abrasive slurry jet (ASJ) is presented and discussed both numerically and experimentally. A numerical investigation using the dynamic meshing technique in Computational Fluid Dynamics (CFD) is carried out first to model the ASJ flow and explore the effect of ultrasonic vibration on the stagnation zone, particle impact velocity and impact angle, and viscous flow induced erosion process. It has been found that the static pressure in the stagnation zone, particle impact velocity and impact angle are varied periodically with an assistance of the ultrasonic vibration on the workpiece which in turn could affect the material removal process in ASJ micro-channelling of glasses. It is also found from simulation that the ultrasonic vibration is beneficial to the viscous flow induced erosion during the low pressure ASJ micro-machining process. Then, a set of ultrasonic vibration-assisted micro-channelling experiments are conducted on glasses using an ASJ to evaluate its effect on the major micro-channelling performance. It is found that ultrasonic vibration assisted ASJ micro-channelling increases the material removal rate, channel depth and top channel width, while decreases the channel wall inclination angle, as compared to the traditional ASJ micro channelling process at the same experimental condition. However, the surface quality on the bottom of the channel seems to be not significantly affected by the ultrasonic vibration. These findings from the experiment are in a reasonably good agreement with the corresponding simulated results. (C) 2016 Elsevier Ltd. All rights reserved.