Micro-wear properties of carbon nitride coatings

Micro-wear properties of carbon nitride coatings
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氮化碳涂层的微磨损性能

DOI:
10.1016/s0043-1648(99)00338-5
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发表时间:
2000
期刊:
影响因子:
5
通讯作者:
N. Umehara
N. Umehara
中科院分区:
工程技术1区
文献类型:
--
作者:
K. Katô;Hiroyuki Koide;N. Umehara

文献摘要

被引文献

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使用原子力显微镜对金刚石销钉上的非晶氮化碳(CNx)涂层进行了微磨损测试。 CNx 的微磨损特性显示为涂层条件、接触载荷、销半径和接触压力的函数。该涂层条件提供了CNx涂层的比磨损量大约10倍的差异。当接触载荷增加到临界值以上时,CNx 涂层的磨损深度急剧增加。 CNx 受到销半径的影响。在相同接触载荷下,CNx涂层的磨痕深度随销半径的变化而变化。结合接触载荷和销半径的影响,明确了接触压力对特定磨损量的影响。 CNx涂层的比磨损量随着最大接触压力的增加而增加。另一方面,DLC 的具体磨损量与最大接触压力无关。在最大接触压力低于约10 GPa时,CNx涂层的比磨损量小于DLC的比磨损量。 CNx 涂层磨损的接触压力依赖性是通过涂层的纳米级分层引入的。
Micro-wear tests of amorphous carbon nitride (CNx) coating against a diamond pin were carried out by using a atomic force microscopy. Micro-wear properties of CNxwere shown as functions of coating condition, contact load, pin radius and contact pressure. The coating condition provides about 10 times difference of specific wear amount of CNxcoating. The depth of wear of CNxcoating increased drastically by increasing the contact load to above a critical value. CNxwas influenced pin radius. The depth of wear scar of CNxcoating changed depending on the pin radius under the same contact load. Combined with the effects of contact load and pin radius, the effect of contact pressure on specific wear amount was made clear. The specific wear amount of CNxcoating increased with maximum contact pressure. On the other hand, specific wear amount of DLC was shown to be independent of maximum contact pressure. At the maximum contact pressure lower than about 10 GPa, the specific wear amount of CNxcoating was smaller than that of DLC. Contact pressure dependence of wear of CNxcoating was introduced by nano-scale delamination of the coating.