S.Inoue, Y.Wada, K.Koterazawa: "Deposition of TiC films by dual source dc magnetron sputtering"Vacuum. (in press). (2000)
S.Inoue, Y.Wada, K.Koterazawa: "Deposition of TiC films by dual source dc magnetron sputtering"Vacuum. (in press). (2000)
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S.Inoue、Y.Wada、K.Koterazawa:“双源直流磁控溅射沉积 TiC 薄膜”真空。
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