Design and development of a 3D scanning MEMS OCT probe using a novel SiOB package assembly
Design and development of a 3D scanning MEMS OCT probe using a novel SiOB package assembly
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DOI：
10.1088/0960-1317/18/12/125005
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发表时间：
2008-12-01
影响因子：
2.3
通讯作者：
Olivo, M.
中科院分区：
文献类型：
--
作者：
Xu, Y.;Singh, J.;Olivo, M.
采用基于硅光学台架(SiOB)的独特组件，研制了一种MEMS光学相干层析成像(OCT)探头样机。该探头是由三维(3D)扫描微镜、梯度折射率(GRIN)透镜和光纤集成在具有预制的自对准狭缝的SiOB基片上形成的。两轴扫描微镜是基于电热驱动的，机械变形最高可达17度，所需电压低于2V。光学探头被封闭在生物兼容、透明和防水的聚碳酸酯管内，以期用于活体诊断应用。微型探头直径小于4 mm，刚性部分长度约为25 mm。以一张红外卡为标准样品，通过获取其三维OCT图像和人脸图像，验证了该探头的工程设计和概念验证。
A MEMS optical coherence tomography (OCT) probe prototype was developed using a unique assembly based on silicon optical bench (SiOB) methodology. The probe is formed by integrating a three-dimensional (3D) scanning micromirror, gradient refractive index ( GRIN) lens and optical fiber on SiOB substrates having prefabricated self-aligned slots. The two-axis scanning micromirror is based on electrothermal actuation with required voltage less than 2 V for mechanical deflections up to 17 degrees. The optical probe was enclosed within a biocompatible, transparent and waterproof polycarbonate tube with a view of in vivo diagnostic applications. The diameter of the miniature probe is less than 4 mm and the length of its rigid part is about 25 mm. The probe engineering and proof of concept of the probe were demonstrated by obtaining en face and three-dimensional OCT images of an IR card used as a standard sample.