Towards a CMOS-Compatible Accelerometer Using Self-Powered Teng System

Towards a CMOS-Compatible Accelerometer Using Self-Powered Teng System
复制标题

DOI：
10.1109/powermems56853.2022.10007574
复制
发表时间：
2022-12
期刊：
2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)
影响因子：
--
通讯作者：
Mohammad Alzgool;Yu Tian;B. Davaji;Shahrzad Towfighian
Mohammad Alzgool;Yu Tian;B. Davaji;Shahrzad Towfighian
中科院分区：
其他
文献类型：
--
作者：
Mohammad Alzgool;Yu Tian;B. Davaji;Shahrzad Towfighian

文献摘要

相似文献

本文提出了一种基于MEMS摩擦电纳米发电机（TENG）系统的加速度计。与传统的台面级TENG不同，该器件采用标准、可扩展到大批量制造和CMOS兼容工艺制造。与CMOS技术的兼容性为创建各种集成自供电传感器和带有电子元件的通信系统打开了大门。所提出的自供电加速度计可以直接从TENG输出电压测量加速度，其中不需要外部电源。当在每个频率下施加正弦基础激励时，该器件表现出线性行为。
This paper exhibits an accelerometer based on a MEMS triboelectric nanogenerator (TENG) system. Unlike traditional mesa-scale TENGs, this device is fabricated using standard, scalable to high-volume manufacturing and CMOS-compatible processes. Compatibility with CMOS technologies opens a door for the creation of various integrated self-powered sensors and communication systems with electronic components. The presented self-powered accelerometer can measure the acceleration with direct voltage measurements from TENG output, where no external power is needed. The device exhibits linear behavior when sinusoidal base excitation is applied at each frequency.