Prototyping of Acceleration Sensor by Using Lathe-type Electro-chemical Discharge Machine

Prototyping of Acceleration Sensor by Using Lathe-type Electro-chemical Discharge Machine
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使用车床式电化学放电机制作加速度传感器原型

DOI:
10.1016/j.procir.2016.02.317
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发表时间:
2016
期刊:
影响因子:
--
通讯作者:
Shunsuke Kojima
Shunsuke Kojima
中科院分区:
--
文献类型:
--
作者:
K. Furutani;Shunsuke Kojima

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本文介绍了在车床型机床上进行电火花加工在精密零件制造中的应用。在精细零件电火花加工中,工具电极用2轴力传感器或刚性支撑件保持。由于力传感器是柔性的,工具电极和工件之间的摩擦使力传感器在其横向方向上变形,并且加工表面变得不平坦。当工具电极与刚性支撑件保持在一起并以恒定速度进给时,加工表面是光滑的。在NaOH溶液中对压电陶瓷进行了光滑加工。放电热引起的晶界剥落是去除过程的主要原因。
This paper deals with an application to fine part fabrication by electro-chemical discharge machining (ECDM) with a lathe type machine. In the fine part ECDM, a tool electrode was held with a 2-axis force sensor or a rigid support. Because the force sensor was flexible, the friction between the tool electrode and a workpiece deformed the force sensor in its lateral direction, and the machined surface became uneven. When the tool electrode was held with the rigid support and fed at a constant velocity, the machined surface was smooth. A piezoelectric ceramics was machined smoothly in NaOH solution. Spalling from grain boundaries by the discharge heat mainly caused the removal process.