Thin film formation and characterization of plasma produced by pulsed laser ablation of h-BN target

Thin film formation and characterization of plasma produced by pulsed laser ablation of h-BN target
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脉冲激光烧蚀 h-BN 靶材薄膜形成及等离子体表征

DOI:
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发表时间:
2009
期刊:
Proceedings of the Plasma Science Symposium 2009/ The 26th Symposium on plasma Processing
影响因子:
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通讯作者:
Atsushi Yokoyama
Atsushi Yokoyama
中科院分区:
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文献类型:
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作者:
Hironori Ohba;Morihisa Saeki;Fumitaka Esaka;Hiroyuki Yamamoto;Atsushi Yokoyama

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