Design, Fabrication, and Characterization of CMOS MEMS-Based Thermoelectric Power Generators
Design, Fabrication, and Characterization of CMOS MEMS-Based Thermoelectric Power Generators
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DOI：
10.1109/jmems.2010.2041035
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发表时间：
2010-04-01
影响因子：
2.7
通讯作者：
Feng, Hanhua
中科院分区：
文献类型：
--
作者：
Xie, Jin;Lee, Chengkuo;Feng, Hanhua
本文介绍了一种基于CMOS微机电系统的将废热转化为几微瓦电能的温差发电器的设计、建模、制造和特性。重掺磷和重掺硼的多晶硅薄膜被图案化和电连接，以组成热电堆。为了优化热通量，热腿被嵌入在顶部和底部真空腔之间，这些真空腔在低温下被密封在晶片水平上。在设备的冷侧涂覆散热层，以有效地将设备冷侧的热量分散到环境空气中。外围腔体的设计是为了将热量从周围的硅衬底中隔离出来。仿真和实验都验证了上述三种独特的设计大大提高了能量转换效率。该器件是通过与CMOS兼容的工艺制造的。通过测试结构测量了热电材料的性能，如塞贝克系数、电阻率和比接触电阻。对于尺寸为1 cm(2)、两端温差为5K的器件，在匹配负载电阻的情况下，开路电压为16.7V，输出功率为1.3微瓦。随着时间的推移，这种能量可以有效地积累为有用的电能，并可以延长电池的寿命。[2009-0066]
This paper presents the design, modeling, fabrication, and characterization of CMOS microelectromechanical-systems-based thermoelectric power generators (TPGs) to convert waste heat into a few microwatts of electrical power. Phosphorus and boron heavily doped polysilicon thin films are patterned and electrically connected to consist thermopiles in the TPGs. To optimize heat flux, the thermal legs are embedded between the top and bottom vacuum cavities, which are sealed on the wafer level at low temperature. A heat-sink layer is coated on the cold side of the device to effectively disperse heat from the cold side of the device to ambient air. The peripheral cavity is designed to isolate heat from the surrounding silicon substrate. Both simulation and experiments are implemented to validate that the energy conversion efficiency is highly improved due to the aforementioned three unique designs. The device has been fabricated by a CMOS-compatible process. Properties of thermoelectric material, such as the Seebeck coefficient, electrical resistivity, and specific contact resistance are measured through test structures. For a device in the size of 1 cm(2) and with a 5-K temperature difference across the two sides, the open-circuit voltage is 16.7 V and the output power is 1.3 mu W under matched load resistance. Such energy can be efficiently accumulated as useful electricity over time and can prolong the battery life. [2009-0066]