A Low-Energy Counting Electron Spectrometer Integrated into a Scanning Electron Microscope

A Low-Energy Counting Electron Spectrometer Integrated into a Scanning Electron Microscope
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集成到扫描电子显微镜中的低能计数电子能谱仪

DOI:
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发表时间:
2023
期刊:
Ion and Photon Beam Technology and Nanofabrication (EIPBN
影响因子:
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通讯作者:
Keathley, Phillip D.
Keathley, Phillip D.
中科院分区:
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文献类型:
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作者:
Simonaitis, John;Krielaart, Maurice;Slayton, Benjamin;Alongi, Joseph;Yang-Keathley, Yugu;Berggren, Karl;Keathley, Phillip D.

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