Surface morphology, structure, magnetic and electrical transport properties of reactive sputtered polycrystalline Ti1−xFexN films
Surface morphology, structure, magnetic and electrical transport properties of reactive sputtered polycrystalline Ti1−xFexN films
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DOI：
10.1016/j.apsusc.2012.01.088
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发表时间：
2012-03
影响因子：
6.7
通讯作者：
Xiaocha Wang;W. Mi;Guifeng Chen;X. M. Chen;Bao-he Yang
中科院分区：
文献类型：
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作者：
Xiaocha Wang;W. Mi;Guifeng Chen;X. M. Chen;Bao-he Yang
采用反应对靶溅射法制备了不同Fe原子分数（x）的Ti 1 −xFexN多晶薄膜。随着x的增加，薄膜的晶格取向由（200）向（111）转变，薄膜的表面形貌由球形、三角锥状岛状向无规叶状转变。薄膜具有铁磁性，居里温度高于305 K，饱和磁化强度（Ms）很小。在低温下观察到明显的非对称M-H曲线，并且由于钉扎力矩的弛豫，M-H曲线的位移随温度的升高而减小。所有样品在低温范围内均表现出变程跳跃机制的类相变行为。磁阻（MR）非常小。Fe 3 +-N3−-Fe 3+之间的相互作用是反铁磁超交换耦合，而Fe 3 +-N3−-Ti 3+中不存在双交换，这与Cr掺杂TiN中的双交换不同。
Polycrystalline Ti1−xFexN films with different Fe atomic fractions (x) were fabricated by reactive facing-target sputtering. The lattice orientation changes from (200) to (111) with the increase of x, which makes the surface morphology evolve from spherical, triangular-pyramid-like islands to random-leafs-like ones. The films are ferromagnetic with a Curie temperature of higher than 305K, and the saturation magnetization (Ms) is very small. Obvious asymmetric M–H curves are observed at low temperatures, and the shift of M–H curves decreases with the increasing temperature because of the relaxation of the pinned moments at low temperatures. All of the samples show semiconducting-like behavior with a mechanism of variable-range hopping at low-temperature range. Magnetoresistance (MR) is very small. The small Msand MR can be explained by the facts that the interaction between Fe3+–N3−–Fe3+is antiferromagnetic superexchange coupling, and no double exchange exists in Fe3+–N3−–Ti3+, which is different from that in the Cr-doped TiN films.