Tri-layer antireflection coatings (SiO2/SiO2-TiO2/TiO2) for silicon solar cells using a sol-gel technique
Tri-layer antireflection coatings (SiO2/SiO2-TiO2/TiO2) for silicon solar cells using a sol-gel technique
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DOI：
10.1016/j.solmat.2006.04.001
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发表时间：
2006-10-16
影响因子：
6.9
通讯作者：
Liu, Jun-Chin
中科院分区：
文献类型：
--
作者：
Lien, Shui-Yang;Wuu, Dong-Sing;Liu, Jun-Chin
减反射膜已成为硅太阳电池规模化生产的关键问题之一。它们通常是通过真空过程进行的，如热蒸发、反应溅射和等离子体增强化学气相沉积。在这项工作中，我们展示了一种溶胶-凝胶法来制备非织构单晶硅太阳电池的弧光。在硅太阳电池上沉积了旋涂的二氧化钛单层、二氧化硅/二氧化钛双层和二氧化硅/二氧化钛/二氧化钛三层弧形薄膜，厚度均匀。测得单层、双层和三层弧光的平均反射率(400-1000 nm)分别为9.3%、6.2%和3.2%。理论数据与实验数据之间有很好的相关性。在三层弧光条件下，单晶硅太阳电池的效率提高了39%。这表明，Sol-Gel ARC工艺在低成本太阳能电池制造方面具有很高的潜力。(C)2006爱思唯尔B.V.保留所有权利。
Antireflection coatings (ARCS) have become one of the key issues for mass production of Si solar cells. They are generally performed by vacuum processes such as thermal evaporation, reactive sputtering, and plasma-enhanced chemical vapor deposition. In this work, a sol-gel method has been demonstrated to prepare the ARCS for the non-textured monocrystalline Si solar cells. The spin-coated TiO2 single-layer, SiO2/TiO2 double-layer and SiO2/SiO2-TiO2/TiO2 triple-layer ARCS were deposited on the Si solar cells and they showed good uniformity in thickness. The measured average optical reflectance (400-1000 nm) was about 9.3, 6.2 and 3.2% for the single-layer, double-layer and triple-layer ARCS, respectively. Good correlation between theoretical and experimental data was obtained. Under a triple-layer ARC condition, a 39% improvement in the efficiency of the monocrystalline Si solar cell was achieved. These indicate that the sol-gel ARC process has high potential for low-cost solar cell fabrication. (c) 2006 Elsevier B.V. All rights reserved.