NTT superconducting storage ring—Super‐ALIS
NTT superconducting storage ring—Super‐ALIS
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NTT超导存储环—Super-ALIS
DOI：
10.1063/1.1140903
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发表时间：
1989
影响因子：
1.6
通讯作者：
Nakajima Masayuki
中科院分区：
文献类型：
--
作者：
T. Hosokawa;Kitayama Toyoki;T. Hayasaka;Ido Satoshi;Y. Uno;A. Shibayama;J. Nakata;K. Nishimura;Nakajima Masayuki
研制了一种完全专用于x射线光刻的超导电子存储环。它具有赛道形状，由两个超导弯曲磁体，其他正常导电多极磁体，射频系统，真空系统和光束监测系统组成。贮存环周长16.8 m。临界波长λc为17.3 A。每个同步辐射源点的光束尺寸（σ）小于1mm。这台机器采用能量-提升-在-环方案；电子以大约15兆电子伏的速度注入，然后在环中加速到600兆电子伏。该喷油器是一种新型的带能量压缩系统的直线加速器。更高能量的注入也可用。
A superconducting electron storage ring fully dedicated to x‐ray lithography has been developed. It has a racetrack shape, consisting of two superconducting bending magnets, other normal conducting multipole magnets, rf system, vacuum system, and beam monitoring systems. The storage ring circumference is 16.8 m. The critical wavelength (λc) is 17.3 A. The beam size (σ) at every synchrotron radiation source point is less than 1 mm. This machine employs the energy‐boost‐in‐the‐ring scheme; electrons are injected at around 15 MeV and then accelerated to 600 MeV in the ring. The injector is a newly developed linear accelerator with an energy compression system. Higher‐energy injection is also available.