Characterization of Zinc Oxide Micropatterns Deposited on Self-Assembled Monolayer Template

Characterization of Zinc Oxide Micropatterns Deposited on Self-Assembled Monolayer Template
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自组装单层模板上沉积的氧化锌微图案的表征

DOI:
10.2109/jcersj.110.386
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发表时间:
2002
影响因子:
1.1
通讯作者:
K. Koumoto
K. Koumoto
中科院分区:
材料科学4区
文献类型:
--
作者:
N. Saito;H. Haneda;Di Li;K. Koumoto

文献摘要

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ZnO 微图案是通过使用以苯基/OH 表面官能团封端的自组装单层模板通过位点选择性化学沉积制造的。 ZnO 仅沉积在基底的 Pd 催化的苯基区域上。 ZnO图案的特征边缘锐度估计为-0.2μm颗粒尺寸的几倍。 ZnO 单晶颗粒在基底上生长,形成致密的单颗粒层。 X射线衍射峰的变宽归因于源自水溶液的缺陷引起的应变。透射电子显微照片显示,ZnO 颗粒在催化基质上连续生长。
ZnO micropatterns were fabricated through site-selective electroless deposition using self-assembled monolayer template terminated with phenyl/OH-surface functional groups. ZnO was deposited only on the Pd-catalyzed phenyl-regions of the substrate. The feature edge acuity of the ZnO patterns was estimated as several times of the particle size of -0.2μm. ZnO single crystal particles were grown on the substrate forming a dense, mono-particulate layer. The broadening of X-ray diffraction peaks was attributed to the strain due to the defects originated in an aqueous solution. Transmission electron micrographs revealed that ZnO particles were continuously grown on the catalyzed substrate.