Imaging diagnostics of debris from laser-produced tin plasma with droplet target for EUV light source
Imaging diagnostics of debris from laser-produced tin plasma with droplet target for EUV light source
复制标题
使用 EUV 光源的液滴目标对激光产生的锡等离子体碎片进行成像诊断
DOI：
10.2961/jlmn.2008.03.0012
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发表时间：
2008
期刊：
影响因子：
--
通讯作者：
T. Okada
中科院分区：
文献类型：
--
作者：
D. Nakamura;T. Akiyama;A. Takahashi;T. Okada
针对一种实用的极紫外光刻光源，研究了激光产生的锡等离子体碎片的动力学特性。采用激光诱导荧光成像法和高速成像法分别研究了Nd：YAG激光和CO2激光双脉冲辐照下Sn原子和Sn液滴靶中致密颗粒的动力学行为。在Nd：YAG激光器的预脉冲照射之后，Sn原子以快至20 km/s的速度从靶向所有方向喷射，并且致密的粒子云通过由于等离子体膨胀而产生的反作用力以大约500 m/s的速度膨胀。随后用CO2激光主脉冲辐照膨胀靶，密集云几乎消失。
The dynamics of debris from laser-produced tin (Sn) plasma was investigated for a practical extreme ultraviolet (EUV) lithography source. The kinetic behaviors of the Sn atoms and of the dense particles from Sn droplet target irradiated by double pulses from the Nd:YAG laser and the CO2 laser were also investigated by the laser-induced fluorescence imaging method and a high-speed imaging, respectively. After the pre-pulse irradiation of the Nd:YAG laser, the Sn atoms were ejected in all direction from the target with a speed of as fast as 20 km/s and the dense particle cloud expanded by a reaction force due to the plasma expansion with a speed of approximately 500 m/s. The expanding target was subsequently irradiated by the main-pulse of CO2 laser and the dense cloud was almost disappeared by main-pulse irradiation.