Relationship Between Lateral Field Excited AT-Cut Quartz Crystal Microbalance Operation and Acoustic Plate Modes
Relationship Between Lateral Field Excited AT-Cut Quartz Crystal Microbalance Operation and Acoustic Plate Modes
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DOI：
10.1109/ius46767.2020.9251368
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发表时间：
2020-09
期刊：
影响因子：
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通讯作者：
Jequil S R Hartz;J. Vetelino;N. Emanetoglu
中科院分区：
文献类型：
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作者：
Jequil S R Hartz;J. Vetelino;N. Emanetoglu
横向场激励石英晶体微天平在各种电边界条件下的工作模式已被研究用于传感应用。本研究结果表明声学板模式（APM）和LFE-QCM模式的行为之间的联系。沉积的薄导电和半导电膜的LFE-QCM模式响应的影响强烈同意报告的影响APM。因此，LFE器件的主要工作模式的结论是横向变化的APM，这可能是接近厚度模式的字符。从这个角度解释了由缓慢变化的表面曲率引起的模式响应变化。对通常的LFE厚度模式耦合形式的一致性进行了评价，发现叠加分波法更适合于分析LFE器件。这种通过APM操作的LFE设备的观点支持通过访问现有的APM知识来改进传感应用和调查。
The operational modes of lateral field excited (LFE) quartz crystal microbalances (QCMs) under various electrical boundary conditions have been under investigation for use in sensing applications. The present results indicate connections between the behaviors of acoustic plate modes (APMs) and LFE-QCM modes. The influences of deposited thin conducting and semiconducting films on the mode responses of LFE-QCMs strongly agree with reported effects on APMs. Thus the main operating modes of LFE devices are concluded to be laterally varying APMs, which may be close in character to thickness modes. Mode response changes caused by slowly varying surface curvature are explained from this perspective. The consistency of the usual LFE thickness mode coupling formalism is evaluated, and the superposition of partial waves method is found to be more appropriate for analyzing LFE devices. This view of LFE devices operating through APMs supports improved sensing applications and investigations through access to existing APM knowledge.