Tailored nanochannels of nearly cylindrical geometry analysed by small angle X-ray scattering

Tailored nanochannels of nearly cylindrical geometry analysed by small angle X-ray scattering
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通过小角度 X 射线散射分析近圆柱形几何形状的定制纳米通道

DOI:
10.1007/s00339-013-8167-4
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发表时间:
2013
期刊:
Applied Physics A
影响因子:
--
通讯作者:
B. Stühn
B. Stühn
中科院分区:
--
文献类型:
--
作者:
B. Kuttich;M. Engel;C. Trautmann;B. Stühn

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高纵横比的纳米通道,制作通过辐照聚酰亚胺薄膜与快速重离子的能量为2.2 GeV,随后敏化和蚀刻的离子轨道过氧化氢和次氯酸钠,分别。通过小角X射线散射结合一个新的形状因子模型,考虑双圆锥形通道的几何形状的纳米通道进行了分析。这种方法使我们能够调整蚀刻参数,以控制通道形状的调整。
High aspect-ratio nanochannels were fabricated by irradiating polyimide films with swift heavy ions of 2.2 GeV energy and subsequently sensitising and etching the ion tracks in hydrogen peroxide and sodium hypochloride, respectively. The nanochannels were analysed by means of small angle X-ray scattering in combination with a new form factor model that considers bi-conical channel geometry. This approach allows us to tune the etching parameters for controlled channel shape adjustment.
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径迹蚀刻膜中的纳米通道
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