Fabrication of precise micro-holes on quartz substrates with improved aspect ratio using a constant velocity-feed drilling technique of an ECDM process
Fabrication of precise micro-holes on quartz substrates with improved aspect ratio using a constant velocity-feed drilling technique of an ECDM process
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DOI：
10.1088/1361-6439/aae8f5
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发表时间：
2018-12-01
影响因子：
2.3
通讯作者：
Sankar, A. Ravi
中科院分区：
文献类型：
--
作者：
Saranya, S.;Sankar, A. Ravi
在本研究中，进行了详细的实验研究的恒速进给钻削技术的电化学放电加工（ECDM）过程中，以制造石英基板上的微孔。首先，四种不同直径的圆柱形微型工具（145 μ m、195 μ m、300 μ m和400 μ m），具有不同的刀具进给率（TER）（0.3 μ m·s（-1）-1.9 μ m·s（-1））来研究它们对制造微孔的精度的影响，同时使用30wt%NaOH溶液作为电解质，加工电压为30 V，初始工作间隙为5 μ m。最小微孔直径和过切实现了在TFR 0.8 μ m s（-1）的所有直径的圆柱形工具。考虑到0.8 μ m s（-1）作为最佳的TFR，使用球直径为145 μ m和主轴直径为90 μ m的球形工具电极的质量指标的工具形状的影响进行了研究。在相同的工艺参数下，与圆柱形刀具相比，球形刀具加工的微孔入口直径、入口过切量、中心直径和中心过切量分别减小了12%、29%、28%和67%。在不使用成本密集型设备、反馈机构、涂层刀具和刀具旋转的情况下，实现了具有改进的精度和纵横比的微孔。
In the present study, a detailed experimental investigation is carried out on a constant velocity-feed drilling technique of an electrochemical discharge machining (ECDM) process to fabricate micro-holes on quartz substrates. First, cylindrical micro-tools of four different diameters (145 mu m, 195 mu m, 300 pm and 400 mu m) with varying tool feed rates (TERs) (0.3 mu m s(-1)-1.9 mu m s(-1)) are considered to study their influence on the precision of fabricated micro-holes while using a 30 wt% NaOH solution as an electrolyte, a machining voltage of 30 V and an initial working gap of 5 mu m. Minimum micro-hole diameter and overcut were achieved at a TFR 0.8 mu m s(-1) for the cylindrical tools of all diameters. Considering 0.8 mu m s(-1) as an optimal TFR, the influence of tool shape on the quality metrics was investigated using a spherical shaped tool electrode having a ball diameter of 145 mu m and a spindle diameter of 90 mu m. A micro-hole realized using the spherical shaped tool shows that the entrance diameter, entrance overcut, central diameter and central overcut are reduced by 12%, 29%, 28% and 67% respectively as compared to that realized using a cylindrical tool for the same process parameters. Micro-holes with improved precision and aspect ratio are achieved without using cost intensive equipments, feedback mechanisms, coated tools and tool rotation.