Characterization of hollow cathode and parallel plate microplasmas: scaling and breakdown
Characterization of hollow cathode and parallel plate microplasmas: scaling and breakdown
复制标题
空心阴极和平行板微等离子体的表征：结垢和击穿
DOI：
10.1088/0963-0252/20/2/025011
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发表时间：
2011
影响因子：
3.8
通讯作者：
P. Maguire
中科院分区：
文献类型：
--
作者：
J. Greenan;C. Mahony;D. Mariotti;P. Maguire
我们提出了一个实验比较平行板和空心阴极微等离子体结构，在高压下窄阳极-阴极间隙操作。采用±12µm空间分辨率的可移动阳极布置来改变电极间距，使两种结构的pd范围在0.01至4 Torr cm之间。空心阴极放电的压力-直径（pD）积值在1.8 ~ 7.2 Torr cm之间，长径比为~ 5。V-I特性分析表明，在低电流和高电流模式下，j/p2和j2p分别具有标度。通过求解基于4p氩能级跃迁的数值碰撞辐射模型，得到了2 ~ 3ev的电子温度估计。用解析法确定了电离和非电离两种情况下的空心阴极鞘层厚度，并通过数值求解扩散方程来估计电离鞘层情况下的等离子体密度分布。
We present an experimental comparison of parallel plate and hollow cathode microplasma structures, operated at high pressure with narrow anode–cathode gaps. A moveable anode arrangement with ±12 µm spatial resolution was used to vary the electrode separation to cover the pd range between 0.01 and 4 Torr cm for both structures. The hollow cathode discharge was operated with pressure–diameter (pD) product values between 1.8 and 7.2 Torr cm and an aspect ratio of ∼5. Analysis of V–I characteristics shows j/p2 and j2p scaling for low and high current modes, respectively. Electron temperature estimates between 2 and 3 eV were obtained by solving a numerical collisional–radiative model based on transitions from 4p argon levels. The hollow cathode sheath thickness for both ionizing and non-ionizing sheath conditions was determined analytically and the diffusion equation was solved numerically to estimate the plasma density profile for the ionizing sheath case.