Improvement of the Sensitivity and Selectivity of Gas Molecules of Graphene-base Gas Sensor with Carbon Nanotubes under the Application of Strain
Improvement of the Sensitivity and Selectivity of Gas Molecules of Graphene-base Gas Sensor with Carbon Nanotubes under the Application of Strain
复制标题
应变作用下碳纳米管石墨烯基气体传感器气体分子灵敏度和选择性的提高
DOI：
10.1115/imece2022-95307
复制
发表时间：
2023
期刊：
影响因子：
--
通讯作者：
and Hideo Miura
中科院分区：
文献类型：
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作者：
Yuto Hirose;Xiangyu Qiao;Wangyang Fu;Ken Suzuki;and Hideo Miura
以石墨烯纳米带为敏感元件，研制了一种新型的高灵敏度、紧凑型的多气体呼吸传感器，用于多种疾病的早期检测。尽管石墨烯的电阻变化是通过吸附各种气体而出现的，但当多种气体分子同时吸附在石墨烯上时，无法单独识别气体分子。到目前为止，没有确认选择性。为了提高石墨烯基气体传感器的灵敏度和选择性，在石墨烯上直接合成碳纳米管（CNTs），以增加分子吸附表面的面积。石墨烯的合成是在低压化学气相沉积室内在具有非常高纯度的铜催化剂基底上进行的。然后将生长的石墨烯转移到Si/SiO2衬底上。在该转移过程中，确认石墨烯中没有损坏。热化学气相沉积方法也被应用于直接在GNR传感器元件上生产CNT层。证实了合成的CNT与基底石墨烯层之间的稳定欧姆接触。与传统的单石墨烯基传感器相比，具有CNT层的石墨烯基气体传感器显示出对气体分子的灵敏度的急剧增加。
A biochemical sensor using graphene nanoribbons as a sensing element was developed for a new generation highly sensitive and compact multi-gas sensor of human’s breath for the early detection of various diseases. Even though the resistance changes of graphene appeared by adsorption of various gases, it was impossible to identify the gas molecules individually when plural kinds of gas molecules adsorbed on graphene at the same time. No selectivity was confirmed so far. In this study, to improve the sensitivity and selectivity of graphene-base gas sensor, carbon nanotubes (CNTs) were directly synthesized on graphene for increasing the area of the molecular adsorption surface. The synthesis of graphene was carried out inside a low-pressure chemical vapor deposition chamber on a copper catalyst substrate with very high purity. The grown graphene was then, transferred onto a Si/SiO2substrate. No damage was confirmed in graphene during this transfer process. A thermochemical vapor deposition method was also applied to the production of a CNT layer directly on the GNR sensor elements. The stable ohmic contact between the synthesized CNTs and the base graphene layer was confirmed. The graphene-base gas sensor with a CNT layer showed drastic increase in the sensitivity of gas molecules comparing with a conventional single graphene-base sensor.