Design, Fabrication and Characterization of Novel Piezoresistive Pressure Microsensor for TPMS
Design, Fabrication and Characterization of Novel Piezoresistive Pressure Microsensor for TPMS
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DOI：
10.1109/asscc.2006.357946
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发表时间：
2006-11
期刊：
影响因子：
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通讯作者：
Yanhong Zhang;Bingwu Liu;Litian Liu;Zhimin Tan;Zhaohua Zhang;Huiwang Lin;T. Ren
中科院分区：
文献类型：
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作者：
Yanhong Zhang;Bingwu Liu;Litian Liu;Zhimin Tan;Zhaohua Zhang;Huiwang Lin;T. Ren
设计、制作并测试了一种用于汽车轮胎压力监测系统（TPMS）的新型压阻式微传感器。采用30 μ m厚的硅隔膜（从370 μ m × 370 μ m到970 μ m × 970 μ m），比传统压阻式压力传感器的硅隔膜厚，这扩展了体硅中的高应力分布。设计了一种新型的弯折形压敏电阻，并将部分弯折形压敏电阻制作在高应力的体硅上，以获得高的线性度和灵敏度。模拟、测量和分析了不同膜片面积、压阻形状和放置方式对微传感器性能的影响。整个制作成本低，与标准IC工艺兼容，可以容忍较大的工艺变化。获得了良好的微传感器精度（0.23%/FS）。整个工作为胎压监测系统等领域提供了一种小尺寸、高性能、低成本的压阻式微传感器解决方案。
Novel piezoresistive microsensors for automotive tire pressure monitoring system (TPMS) are designed, fabricated and tested. 30 mum thick silicon diaphragms (from 370 mum times 370 mum to 970 mum times 970 mum) are adopted, thicker than that of the conventional piezoresistive pressure sensor, which extends the high stress distribution in the bulk silicon. Novel meander shape piezoresistors are designed, parts of which are fabricated on the high stress bulk silicon to obtain high linearity and sensitivity. Different diaphragm areas, piezoresistive shapes and placing methods on the microsensor performances are simulated, measured and analyzed. The whole fabrication is low-cost and compatible with standard IC process, which tolerates large process variations. Good microsensor precision (0.23%/FS) is obtained. The whole work indicates a novel solution of small size, high performance and low cost piezoresistive microsensor for TPMS and many other applications.