Oxygen Gettering Effect During the Reactive Evaporation of Manganese Oxide Films
Oxygen Gettering Effect During the Reactive Evaporation of Manganese Oxide Films
复制标题
氧化锰薄膜反应蒸发过程中的吸氧效应
DOI：
10.1557/jmr.1999.0222
复制
发表时间：
1999
影响因子：
2.7
通讯作者：
Yasumitsu Ito
中科院分区：
文献类型：
--
作者：
M. Isai;Katsumasa Yamaguchi;Haruhiko Iyoda;H. Fujiyasu;Yasumitsu Ito
采用反应蒸发法制备了锂二次电池用氧化锰薄膜。通过电阻加热从钼舟蒸发Mn，并在氧气氛下沉积在载玻片上。用X射线光电子能谱（XPS）和X射线衍射对这些薄膜进行了研究。本研究制备了具有宽Mn价态的Mn氧化物薄膜。发现当开始沉积Mn时，背压迅速变化。这意味着Mn原子开始与O_2反应。这意味着可以利用反应蒸发过程的原位检测。
Manganese oxide films for lithium secondary batteries were prepared using a reactive evaporation method. Mn was evaporated from a molybdenum boat by resistive heating and deposited on a glass slide under oxygen atmosphere. These films were examined with x-ray photoelectron spectroscopy (XPS) and x-ray diffraction. The Mn oxide films with a wide valency of Mn were prepared in this study. A rapid change of the back pressure was found as the deposition of Mn was started. This implies that Mn atoms start to react with O_2. This means that in situ detection of reactive evaporation process can be utilized.