Micro-grooving of glass using micro-abrasive jet machining
Micro-grooving of glass using micro-abrasive jet machining
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DOI：
10.1016/j.matprotec.2003.11.013
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发表时间：
2004-02-28
影响因子：
6.3
通讯作者：
Cho, WS
中科院分区：
文献类型：
--
作者：
Park, DS;Cho, MW;Cho, WS
磨料喷射加工（AJM）类似于喷砂，可有效去除硬脆材料。AJM已应用于粗加工，如去毛刺和粗精加工。随着陶瓷、半导体、电子器件和液晶显示器等材料加工需求的增加，微细自对准加工已成为一种有用的微细加工技术。本文介绍了微磨料射流在玻璃微槽加工中的性能。孔型的直径和线型槽的宽度为80 μ m。实验结果表明，在玻璃的微槽加工性能良好，但是，加工槽的尺寸增加约2-4妈妈。通过对掩模工艺的微调和对薄膜磨损的补偿，微自对准微机械可以有效地应用于半导体、电子器件和液晶显示器的微加工。(C)2003 Elsevier B. V.保留所有权利。
Abrasive jet machining (AJM) is similar to sand blasting, and effectively removes hard and brittle materials. AJM has been applied to rough working such as deburring and rough finishing. With the increase of the needs for machining of ceramics, semiconductors, electronic devices and LCD's, micro-AJM has become a useful technique for micro-machining. This paper describes the performance of micro-AJM in the micro-grooving of glass. The diameter of the hole-type and the width of the line-type groove are 80 mum. Experimental results showed good performance in micro-grooving of glass; however, the size of machined groove increased about 2-4 mum. With the fine-tuning of the masking process and the compensation for film wear, micro-AJM could be effectively applied to the micro-machining of semiconductors, electronic devices and LCD. (C) 2003 Elsevier B.V. All rights reserved.