Systematic error control for deflectometry with iterative reconstruction
Systematic error control for deflectometry with iterative reconstruction
复制标题
通过迭代重建进行偏转测量的系统误差控制
DOI：
10.1016/j.measurement.2020.108393
复制
发表时间：
2021
期刊：
影响因子：
5.6
通讯作者：
Zhang Xinwei
中科院分区：
文献类型：
--
作者：
Wang Ruiyang;Li Dahai;Zhang Xinwei
相位测量弯沉仪的斜率计算本质上是一个寻找摄像机、屏幕和反射点之间的对应关系的问题，而反射点存在模糊性问题。这一问题可以通过迭代重建策略来解决，但迭代周期中系统误差的存在严重影响了精度性能。根据重建高度建立线性关系迭代寻找反射点，并在迭代循环中加入系统误差控制以提高迭代重建精度。介绍了一种球面测量方法。重建高度的最佳拟合曲率半径与球径仪的结果相差0.1 mm。获得了245.1 nm的均方根误差，并将系统误差控制集成到迭代周期中，显著降低了低阶系统误差，图形结果可进一步提升到37.2nmRMS误差。
The slope calculation of phase measuring deflectometry is essentially a problem finding correspondence between camera, screen and reflecting point, while the reflecting point suffers from an ambiguity problem. This problem can be solved using an iterative reconstruction strategy, however, the existence of systematic error in the iteration circle significantly harm the accuracy performance. A linear relation is established to iteratively find the reflecting point according to the reconstructed height, and a systematic error control is integrated into the iteration circle to promote the iterative reconstruction accuracy. A spherical surface measurement is demonstrated. The best fit radius of curvature of the reconstructed height is 0.1 mm apart from the result of a spherometer. A 245.1 nm root mean square (RMS) error is achieved, and with the systematic error control integrated into the iteration circle, the low order systematic error is significantly reduced and the figure result can be further promoted to 37.2 nm RMS error.