Spectroscopic measurements of ablation plasma generated with laser-driven intense extreme ultraviolet (EUV) light
Spectroscopic measurements of ablation plasma generated with laser-driven intense extreme ultraviolet (EUV) light
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对激光驱动的强极紫外 (EUV) 光产生的烧蚀等离子体进行光谱测量
DOI：
10.1088/1742-6596/688/1/012122
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发表时间：
2016
期刊：
影响因子：
--
通讯作者：
and H. Nishimura
中科院分区：
文献类型：
--
作者：
N. Tanaka;K. Hane;H. Shikata;M. Masuda;K. Nagatomi;A. Sunahara;M. Yoshida;S. Fujioka;and H. Nishimura
研究了聚焦极紫外（EUV）光对材料的烧蚀，并与激光烧蚀进行了比较。从EUV和激光烧蚀膨胀离子的动能分布显示出不同的光谱，意味着不同的几何等离子体膨胀。等离子体参数的计算结果表明，EUV能量主要沉积在靠近固体密度的高电子密度区，而激光能量主要沉积在低能量密度区。从可见光谱实验获得的等离子体参数没有表现出显着的差异EUV和激光烧蚀由于相应的低截止密度。
Material ablation by a focused Extreme ultraviolet (EUV) light is studied by comparing expanding ion properties and plasma parameters with laser ablation. The kinetic energy distributions of expanding ions from EUV and laser ablation showed different spectra implying different geometries of plasma expansion. The calculation results of plasma parameters showed that EUV energy is mostly deposited in high electron density region close to the solid density, while laser energy is deposited in low energy density region. Plasma parameters experimentally obtained from visible spectra did not show noticeable difference between EUV and laser ablation due to the corresponding low cut off density.