New dry electrodes based on iridium oxide (IrO) for non-invasive biopotential recordings and stimulation
New dry electrodes based on iridium oxide (IrO) for non-invasive biopotential recordings and stimulation
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DOI：
10.1016/j.sna.2010.09.016
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发表时间：
2010-11-01
影响因子：
4.6
通讯作者：
Correia, J. H.
中科院分区：
文献类型：
--
作者：
Dias, N. S.;Carmo, J. P.;Correia, J. H.
本文提出了一种用于采集生物电势和刺激的新型干电极。这些干电极由 16 个微尖端结构（通过形成 4 x 4 微尖端阵列）组成，这些微尖端结构是通过在氢氧化钾 (KOH) 溶液中对 <100> 型硅基板进行体微机械加工而制成的。制造过程经过微调，每个微尖端呈现 547 度的立体角，宽度在 150-200 μm 范围内，高度为100-200 μm，微尖端间距为 2 mm 电极具有氧化铟 (IrO) 薄层（通过反应直流溅射获得），以改善与皮肤的接触 这些干电极穿透外皮层（1e 角质层，厚 1011 m），以允许与内皮层的电解质液体直接接触 新电极避免使用导电凝胶，并减少 EEG 中的皮肤准备时间对于一组 32 个标准银/氯化银 (Ag/AgCl) 电极，实验可能需要大约 45 分钟 IrO 薄膜的电极电解质阻抗谱 (IS) 在重量浓度为 09% 的盐水溶液中进行，以模拟电极-组织界面 IrO 涂层的 IS 测量结果与标准 Ag/AgCl 电极观察到的结果相当 新的干式微尖阵列构成了一种廉价的低电阻且机械坚固的替代电极快速应用于皮肤的非侵入性生物电记录/刺激 (c) 2010 Elsevier B V 保留所有权利
This paper presents a new type of dry electrodes for acquisition of biopotentials and stimulation These dry electrodes are composed by 16 microtip structures (by forming an array of 4 x 4 microtips) which were fabricated through bulk micromachining of a < 100>-type silicon substrate in a potassium hydroxide (KOH) solution The fabrication process was trimmed in a way that each microtip presents solid angles of 547 a width in the range 150-200 mu m a height of 100-200 mu m and an inter-microtip spacing of 2 mm The electrodes have a thin layer (obtained by reactive DC-sputtering) of indium oxide (IrO) to improve the contact with the skin These dry electrodes penetrate the outer skin layer (1 e stratum corneum that is 1011,m thick) to allow a direct contact with the electrolyte fluids of the inner skin layers The new electrode avoid the use of conductive gels and reduce the skin preparation time in EEG experiments which may take about 45 min for a set of 32 standard silver/silver chloride (Ag/AgCl) electrodes The electrode-electrolyte impedance spectrometry (IS) of the IrO thin-films was performed in a saline solution 09% concentration by weight to mimic the electrode-tissue Interface The IS measured results for the IrO coatings were comparable to the results observed for the standard Ag/AgCl electrodes The new dry microtips array constitutes an inexpensive low resistance and mechanically robust alternative electrode for non-invasive biopotential recording/stimulation with fast application on skin (c) 2010 Elsevier B V All rights reserved