Formation of Conical Carbides on the Surface of Stainless and Alloy Steels by Sputter-Etching
Formation of Conical Carbides on the Surface of Stainless and Alloy Steels by Sputter-Etching
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溅射蚀刻在不锈钢和合金钢表面形成锥形碳化物
DOI：
10.2320/jinstmet.69.312
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发表时间：
2005
影响因子：
--
通讯作者：
K. Nakasa
中科院分区：
文献类型：
--
作者：
Qinglian Zhang;Rongguang Wang;Masahiko Kato;K. Nakasa
在射频磁控溅射装置中，用氩离子对固溶处理的SUS304、SUS430、SCM435和SKD5钢表面进行了7.2、14.4和28.8 ks的溅射刻蚀。FIB和SIM观察表明，在溅射刻蚀过程中，所有钢的表面都形成了圆锥形碳化物，并由表面向内部生长。碳含量低的SUS430和SUS304钢的碳化物主要沿晶界析出，而碳含量高的SCM435和SKD5钢的碳化物均匀析出。锥形碳化物的长径比随溅射时间、溅射电压、钢的种类、碳化物的尺寸和密度的不同而在2 ~ 4的范围内变化。碳化物的析出是在碳扩散速度和溅射刻蚀速率平衡的情况下发生的。随着溅射刻蚀时间的延长，锥形碳化物的尺寸和密度增大。它们最终消失，但经过长时间的溅射蚀刻后，新析出许多小碳化物。
Surfaces of solution-treated SUS304, SUS430, SCM435 and SKD5 steels were sputter-etched by Argon ions in an R.F. magnetron sputtering apparatus for 7.2, 14.4 and 28.8 ks. The observation using FIB and SIM shows that the conical carbides are formed on the surfaces of all the steels examined, and they are growing from the surface towards inside during sputter-etching. The carbides precipitate more along grain boundaries than in grains for SUS430 and SUS304 steels with low carbon content, while they uniformly precipitate in grains for SCM435 and SKD5 steels with high carbon content. The aspect ratios of conical carbides change within the range from 2 to 4 depending on sputter-etching time, sputter voltage, kinds of steels, size and density of carbides. The precipitation of carbides occurs under the balance of carbon diffusion velocity and sputter-etching rate. The size and density of conical carbides increase with increasing sputter-etching time. They eventually disappear, but many small carbides newly precipitate after long time sputter-etching.