Stability of lithographically patterned transition metal layers controls spatial selectivity during etching of diamond
Stability of lithographically patterned transition metal layers controls spatial selectivity during etching of diamond
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DOI：
10.1016/j.diamond.2022.109482
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发表时间：
2022-10
影响因子：
4.1
通讯作者：
Zhijie Wang;M. R. Shankar
中科院分区：
文献类型：
--
作者：
Zhijie Wang;M. R. Shankar
