Study on a Surface-Motor Driven Precise Positioning System
Study on a Surface-Motor Driven Precise Positioning System
复制标题
表面电机驱动精密定位系统的研究
DOI：
10.1115/1.2799121
复制
发表时间：
1995
影响因子：
1.7
通讯作者：
Yasushi Koyanagawa
中科院分区：
文献类型：
--
作者：
Y. Tomita;Yasushi Koyanagawa
本文介绍了一种新研制的表面电机驱动精密定位系统的特点、工作原理、电磁驱动力设计和实验结果。我们的SFM定位系统的工作台由三个空气轴承垫悬浮在基板上;由三个无刷线性直流电机在三个自由度上驱动。通过三个相同的比例-积分-微分（PID）伺服控制系统的同时操作来实现载物台平面运动的引导和定位，每个伺服控制系统都具有激光干涉仪位置反馈回路。利用磁导率理论分析了电磁产生的驱动力，计算结果与实验结果吻合较好。此外，还讨论了系统的闭环动力学行为，包括三轴干涉引起的运动。实验结果表明，在10 mm的行程范围内，定位精度可达10-20 nm，偏航角精度小于±0.08 μrad。
A newly developed precise positioning system incorporating a surface-motor (SFM) drive unit is presented and its advantageous features, operation principles, electromagnetic drive force design, and some experimental results are described. The stage of our SFM positioning system is levitated on a base plate by three air bearing pads ; being driven by three brushless-type linear DC motors in three degrees of freedom. The guidance and positioning of the stage's planar motion are achieved via the simultaneous operation of three identical proportional-integral-derivative (PID) servo-control systems, each having a laser-interferometer position feedback loop. The electromagnetically produced drive forces are analyzed by employing magnetic permeability theory, with good correspondence being obtained between calculated and experimental results. Additionally discussed is the closed-loop dynamic behavior, including the motion caused by three axis-interference. Evaluations of experimental tests indicate that a positioning resolution of 10-20 nm and yaw angle accuracy less than ±0.08 μrad are successfully achieved for an x-y travel range of 10 mm.