Crystal Growth of Cobalt Film Fabricated by Electrodeposition with Dense Carbon Dioxide
Crystal Growth of Cobalt Film Fabricated by Electrodeposition with Dense Carbon Dioxide
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DOI：
10.1149/2.0101509jes
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发表时间：
2015-01-01
影响因子：
3.9
通讯作者：
Sone, Masato
中科院分区：
文献类型：
--
作者：
Luo, Xun;Chen, Chun-Yi;Sone, Masato
研究了高浓度CO2对Co薄膜的形貌、晶体结构、平均晶粒尺寸和表面粗糙度的影响。这里，稠密CO2是指液态（15 MPa、25 ℃）、亚临界状态（15 MPa、30 ℃）、超临界状态（15 MPa、40 ℃）的CO2。在高压池中进行致密CO2电沉积，电解质为20vol%的混合物的密度CO2和80体积%的Co电解质。研究了温度和外加电流密度的影响。致密的CO2，特别是超临界CO2，被认为是有效的，在消除Co膜中形成的缺陷。随着温度的降低和电流密度的增加，薄膜的形貌由脊状向半球状和颗粒状转变。发现平均晶粒尺寸随着电流密度的增加而减小。常压下电沉积的Co薄膜主要由h. c. p.相组成，晶体结构由f.c.c.-当使用浓CO2时，富相。(C)2015年电化学学会。All rights reserved.
Dense CO2 was applied in electrodeposition of Co films to examine its effects on the morphology, crystal structure, average grain size, and surface roughness. The dense CO2 is referring to CO2 in liquid state (15 MPa and 25 degrees C), subcritical state (15 MPa and 30 degrees C), and supercritical state (15 MPa and 40 degrees C) here. The electrodeposition with dense CO2 was conducted in a high-pressure cell, and the electrolyte was a mixture composed of 20 vol.% of the dense CO2 and 80 vol.% of the Co electrolyte. Influences of the temperature and applied current density were also studied. The dense CO2, especially supercritical CO2, was found to be effective in eliminating defects formed in the Co films. Morphology of the Co films changed from ridge-like to hemi-spherical-like and particle-like structures with a decrease in the temperature and an increase in the applied current density. The average grain size was found to decrease with an increase in the current density. The Co films electrodeposited at atmospheric pressure were mainly composed of h.c.p. phase and the crystal structure changed to f.c.c.-rich phase when the dense CO2 was used. (C) 2015 The Electrochemical Society. All rights reserved.