Fabrication of large scale nanostructures based on a modified atomic force microscope nanomechanical machining system.
Fabrication of large scale nanostructures based on a modified atomic force microscope nanomechanical machining system.
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DOI：
10.1063/1.3664638
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发表时间：
2011-12
期刊：
影响因子：
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通讯作者：
Z. Hu;Y. Yan;X. S. Zhao;D. Gao;Y. Wei;J. H. Wang
中科院分区：
文献类型：
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作者：
Z. Hu;Y. Yan;X. S. Zhao;D. Gao;Y. Wei;J. H. Wang
基于原子力显微镜（AFM）尖端的纳米机械加工已被证明是制造复杂的二维/三维纳米结构的有力工具。但由于加工规模太小，严重阻碍了该技术的发展。如何扩大加工规模一直是研究的重点。为了扩大加工规模，将移动范围为100 mm × 100 mm的高精度X-Y工作台与商用AFM相结合，建立了一种改进的基于AFM尖端的纳米机械加工系统。结果表明，通过控制恒定的法向载荷，AFM系统的跟踪特性在大规模加工中是可行的。研究了加工方向和刀尖几何形状等加工参数对大尺度均匀加工深度的影响。因此，提出了一种新的尖端轨迹和增加载荷的方案，以实现均匀的加工深度。最后，成功加工出尺寸为1 mm × 0.7 mm、线密度为1000线/mm、平均加工深度为150 nm的聚合物纳米线阵列，以及尺寸为380 μm × 380 μm、平均加工深度为250 nm的20 × 20聚合物方孔阵列。所有纳米结构的加工深度的均匀性是可以接受的。因此，验证了基于AFM尖端的纳米机械加工方法可以用于加工毫米尺度的纳米结构。
The atomic force microscope (AFM) tip-based nanomechanical machining has been demonstrated to be a powerful tool for fabricating complex 2D∕3D nanostructures. But the machining scale is very small, which holds back this technique severely. How to enlarge the machining scale is always a major concern for the researches. In the present study, a modified AFM tip-based nanomechanical machining system is established through combination of a high precision X-Y stage with the moving range of 100 mm × 100 mm and a commercial AFM in order to enlarge the machining scale. It is found that the tracing property of the AFM system is feasible for large scale machining by controlling the constant normal load. Effects of the machining parameters including the machining direction and the tip geometry on the uniform machined depth with a large scale are evaluated. Consequently, a new tip trace and an increasing load scheme are presented to achieve a uniform machined depth. Finally, a polymer nanoline array with the dimensions of 1 mm × 0.7 mm, the line density of 1000 lines/mm and the average machined depth of 150 nm, and a 20 × 20 polymer square holes array with the scale of 380 μm × 380 μm and the average machined depth of 250 nm are machined successfully. The uniform of the machined depths for all the nanostructures is acceptable. Therefore, it is verified that the AFM tip-based nanomechanical machining method can be used to machine millimeter scale nanostructures.