Sol-Gel Deposition of Chromium Doped Aluminium Oxide Films (Ruby) for Surface Temperature Sensor Application
Sol-Gel Deposition of Chromium Doped Aluminium Oxide Films (Ruby) for Surface Temperature Sensor Application
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用于表面温度传感器应用的铬掺杂氧化铝薄膜（红宝石）的溶胶凝胶沉积
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发表时间：
2008
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通讯作者：
B. Atakan
中科院分区：
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作者：
Christian Pflitsch;R. A. Siddiqui;C. Eckert;B. Atakan
测量表面温度的一种有前途的方法是使用热成像磷光涂层。在这里，铬掺杂（0-7%）的氧化铝薄膜（红宝石）的沉积相对于这个应用程序进行了研究。生长的薄膜的光学性质在进一步的研究。溶胶-凝胶技术用于薄膜沉积。该方法相当简单，省去了昂贵的装置，因此很容易制备廉价的涂层。三异丙醇铝（ATI）用作铝源，乙酰丙酮铬（Cr（acac）3）用于铬掺杂。通过热重测量（TG/DTA）分析沉积过程。用扫描电子显微镜（SEM）对薄膜的形貌进行了表征，用X射线能谱仪（EDX）分析了薄膜的化学成分，并用X射线衍射仪（XRD）进行了物相分析。结果表明，在563 K下，溶胶-凝胶沉积过程中生成了无定形氧化铝。它变得有序（α-Al 2 O3：...
One promising approach for the measurement of surface temperatures is the use of thermographic phosphor coatings. Here the deposition of chromium doped (0–7%) aluminum oxide films (ruby) with respect to this application is investigated. The optical properties of the grown films are presented in a further study. The sol–gel technique is used for film deposition. The method is rather simple and omits an expensive setup, so cheap coatings are easily prepared. Aluminum tri-isopropoxide (ATI) is used as an aluminum source and chromium acetylacetonate (Cr(acac)3) is used for chromium doping. The deposition process is analyzed by thermogravimetric measurements (TG/DTA). The film morphologies are characterized by scanning electron microscopy (SEM), the chemical compositions are analyzed by energy-dispersive X-ray spectroscopy (EDX), and X-ray diffraction (XRD) is used for the phase analysis. It is shown that amorphous aluminum oxide is prepared during sol–gel deposition at 563 K. It becomes well ordered (α-Al2O3:...