Improvement of measurement accuracy in shadow moiré by considering the influence of harmonics in the moiré profile.
Improvement of measurement accuracy in shadow moiré by considering the influence of harmonics in the moiré profile.
复制标题
通过考虑莫尔轮廓中谐波的影响,提高阴影莫尔条纹的测量精度。
DOI:
10.1364/ao.38.003503
复制
发表时间:
1999
期刊:
影响因子:
1.9
通讯作者:
S. Yokozeki
中科院分区:
文献类型:
--
作者:
Yasuhiko Arai;S. Yokozeki
A method for high-resolution three-dimensional shape measurement for a shadow moiré system is proposed. To increase the resolving power of the method, the problem caused by the harmonics of the moiré profile needs to be solved. It is well known that moiré fringes in a shadow moiré system have a nonsinusoidal profile caused by harmonics. The influence of the harmonics in moiré profile on the measurement accuracy of the method is discussed. The method is improved to eliminate the error caused by the harmonics in the moiré profile. Both simulation and experimental results show that the improved method can effectively reduce the influence of harmonics.