Improvement of measurement accuracy in shadow moiré by considering the influence of harmonics in the moiré profile.

Improvement of measurement accuracy in shadow moiré by considering the influence of harmonics in the moiré profile.
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通过考虑莫尔轮廓中谐波的影响,提高阴影莫尔条纹的测量精度。

DOI:
10.1364/ao.38.003503
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发表时间:
1999
期刊:
影响因子:
1.9
通讯作者:
S. Yokozeki
S. Yokozeki
中科院分区:
工程技术4区
文献类型:
--
作者:
Yasuhiko Arai;S. Yokozeki

文献摘要

被引文献

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提出了一种用于阴影云纹系统的高分辨率三维面形测量方法。为了提高方法的分辨率,需要解决由莫尔轮廓线的谐波引起的问题。众所周知,阴影莫尔系统中的莫尔条纹具有由谐波引起的非正弦轮廓。讨论了莫尔轮廓中的谐波对该方法测量精度的影响。对该方法进行了改进,消除了莫尔轮廓线中的谐波所带来的误差。仿真和实验结果都表明,改进后的方法能有效地抑制谐波的影响。
A method for high-resolution three-dimensional shape measurement for a shadow moiré system is proposed. To increase the resolving power of the method, the problem caused by the harmonics of the moiré profile needs to be solved. It is well known that moiré fringes in a shadow moiré system have a nonsinusoidal profile caused by harmonics. The influence of the harmonics in moiré profile on the measurement accuracy of the method is discussed. The method is improved to eliminate the error caused by the harmonics in the moiré profile. Both simulation and experimental results show that the improved method can effectively reduce the influence of harmonics.