Top-gathering pillar array of hybrid organic-inorganic material by means of self-organization

Top-gathering pillar array of hybrid organic-inorganic material by means of self-organization
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DOI:
10.1007/s00339-006-3568-2
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发表时间:
2006-06-01
影响因子:
2.7
通讯作者:
Misawa, H.
Misawa, H.
中科院分区:
材料科学4区
文献类型:
--
作者:
Segawa, H.;Yamaguchi, S.;Misawa, H.

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具有亚微米到微米重复的二维(2D)柱阵列已经由混合有机-无机材料通过掩模光刻或多光束干涉光刻制造。阵列结构的类型取决于结构参数,例如柱高度、直径和相邻柱之间的距离。通过控制结构参数,可以获得两种周期性阵列:二维阵列和“顶部聚集”阵列。在聚顶阵中,柱子通过自组织的方式聚集在顶部,可以形成由四根柱子组成的“聚顶”单元。
Two-dimensional (2D) pillar arrays with submicrometer to micrometer repetitions have been fabricated from hybrid organic-inorganic material by mask lithography or multi-beam interference lithography. The type of array structure depends on structural parameters such as the pillar height, diameter and distance between neighboring pillars. Two kinds of periodic arrays, 2D arrays and 'top-gathering' arrays, can be obtained by controlling the structural parameters. In the top-gathering arrays, the pillars are gathered at the top by means of self-organization, and 'top-gathering' units composed of four pillars can be formed.