A design of highly sensitive GMI sensor
A design of highly sensitive GMI sensor
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DOI：
10.1016/j.jmmm.2004.11.427
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发表时间：
2005-04-01
影响因子：
2.7
通讯作者：
Arai, KI
中科院分区：
文献类型：
--
作者：
Yabukami, S;Mawatari, H;Arai, KI
采用调幅技术对巨磁阻抗传感器进行了优化。我们的方法是通过有限元分析优化传感器结构，以获得高信噪比。传感器条带的最佳尺寸为：厚度4.3 μ m，条带宽度20 ~ 30 μ m，长度数mm。采用升离法制作弯曲传感器元件[CoNbZr]（厚度4.3 μ m，长度5 mm，宽度30 μ m，匝数3）。在几百兆赫下获得了超过200%的高阻抗变化。当一个小的交流磁场施加到传感器元件上时，一个非常小的调幅信号被磁屏蔽室内的传感器系统检测到。在501 kHz时获得1.7 x 10(-8) Oe/Hz（1/2）的分辨率。(c) 2004 Elsevier B.V.版权所有
Employing amplitude-modulation technique, we have optimized the giant magnetoimpedance (GMT) sensor. Our approach was to optimize the sensor structure so as to obtain a high signal-to-noise ratio by using finite element analysis. The optimum size of sensor strip is as follows: a thickness of 4.3 mu m, a strip width of 20-30 mu m, a length of several mm. The meander sensor element [CoNbZr (thickness, 4.3 mu m; length, 5 mm; width, 30 mu m; number of turns, 3) was fabricated using the lift-off process. A high impedance change over 200% was obtained at several hundred MHz. When a small AC magnetic field was applied to the sensor element, a very small AM signal was detected by the sensor system in a magnetically shielded room. A resolution of 1.7 x 10(-8) Oe/Hz(1/2) was obtained at 501 kHz. (c) 2004 Elsevier B.V. All rights reserved.