Yuji FURUKAWA, Nobuyuki MORONUKI, Kenji UCHIYAMA and Akinori TAKAYAMA: "FABRICATION OF MICRO REGULAR SHAPE USING LASER PROCESS COMBINED WITH ANISOTROPIC ETCHING"PREPRINT OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING. (NOW PRINTING). (2000)

Yuji FURUKAWA, Nobuyuki MORONUKI, Kenji UCHIYAMA and Akinori TAKAYAMA: "FABRICATION OF MICRO REGULAR SHAPE USING LASER PROCESS COMBINED WITH ANISOTROPIC ETCHING"PREPRINT OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING. (NOW PRINTING). (2000)
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Yuji Furukawa、Nobuyuki Moronuki、Kenji UchiYAMA 和 Akinori TAKAYAMA:“利用激光加工结合各向异性蚀刻制造微规则形状”日本精密工程学会预印本。

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