Low power gas detection with FET sensors
Low power gas detection with FET sensors
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DOI：
10.1016/s0925-4005(01)00786-9
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发表时间：
2001-08-30
影响因子：
8.4
通讯作者：
Burgmair, M
中科院分区：
文献类型：
--
作者：
Eisele, I;Doll, T;Burgmair, M
气体传感的功函数原理专用于室内或略微升高的操作温度，因为来自物理吸附和化学吸附的信号贡献将是可检测的。前提是FET晶体管具有由钯或聚合物制成的可渗透栅极或具有悬浮栅极，其气隙允许气体进入栅极电容的内表面。如果使用混合结构，后者的设计允许包含几乎所有敏感材料组。金属氧化物和电化学传感器的可用模型可用于理解这种表面电位方法，并用于开发新传感器的估计概述。所提出的结果表明，巨大的能力的功函数原理导致微气体传感器具有低功耗，适合于低成本应用。然而，可以满足良好操作的气体传感器的一般要求-高选择性、高灵敏度、高稳定性和高S/N比。(C)2001 Elsevier Science B. V.保留所有权利。
The work function principle of gas sensing is dedicated for room or slightly elevated temperatures of operation as signal contributions from both physisorption and chemisorption will be detectable. Prerequisite are FET transistors either with permeable gates made of palladium or polymers or with a suspended gate whose air gap permits the access of gases to the inner surfaces of the gate capacitance. The later design allows to incorporate almost all groups of sensitive materials, if a hybrid construction is used. The available models for metal oxide and electrochemical sensors can be adopted for comprehension of this surface potential method and for an estimative overview for the development of new sensors. The presented results show the vast capability of the work function principle leading to micro gas sensors with low power consumption suitable for low cost applications. Nevertheless, the general requirements for well operating gas sensors - high selectivity, high sensitivity, high stability and high S/N ratio - can be satisfied. (C) 2001 Elsevier Science B.V. All rights reserved.