Diamond-integrated optomechanical circuits
Diamond-integrated optomechanical circuits
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DOI：
10.1038/ncomms2710
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发表时间：
2013-04-01
影响因子：
16.6
通讯作者：
Pernice, Wolfram H. P.
中科院分区：
文献类型：
--
作者：
Rath, Patrik;Khasminskaya, Svetlana;Pernice, Wolfram H. P.
金刚石由于其高杨氏模量、与恶劣环境的兼容性以及优异的热性能，为实现微纳机械谐振器提供了独特的材料优势。同时，5.45 eV 的宽电子带隙使金刚石成为集成光学的合适材料，因为它具有宽带透明度并且不存在硅光子学中常见的自由载流子吸收。在这里，我们利用两者来设计金刚石薄膜中的全尺寸光机械电路。我们表明，通过化学气相沉积制备的多晶金刚石薄膜为实现高质量纳米光子器件提供了方便的晶圆级基底。使用嵌入片上马赫-曾德干涉仪的独立式纳米机械谐振器，我们展示了通过梯度光学力的高效光机械转换。制造的金刚石谐振器可重复地显示出高达 11,200 的高机械品质因数。我们的低成本、宽带、无载流子光子电路有望实现超高频的全光学传感和光机械信号处理。
Diamond offers unique material advantages for the realization of micro-and nanomechanical resonators because of its high Young's modulus, compatibility with harsh environments and superior thermal properties. At the same time, the wide electronic bandgap of 5.45 eV makes diamond a suitable material for integrated optics because of broadband transparency and the absence of free-carrier absorption commonly encountered in silicon photonics. Here we take advantage of both to engineer full-scale optomechanical circuits in diamond thin films. We show that polycrystalline diamond films fabricated by chemical vapour deposition provide a convenient wafer-scale substrate for the realization of high-quality nanophotonic devices. Using free-standing nanomechanical resonators embedded in on-chip Mach-Zehnder interferometers, we demonstrate efficient optomechanical transduction via gradient optical forces. Fabricated diamond resonators reproducibly show high mechanical quality factors up to 11,200. Our low cost, wideband, carrier-free photonic circuits hold promise for all-optical sensing and optomechanical signal processing at ultra-high frequencies.