Optical beam deflection noncontact atomic force microscope optimized with three-dimensional beam adjustment mechanism
Optical beam deflection noncontact atomic force microscope optimized with three-dimensional beam adjustment mechanism
复制标题
采用三维光束调节机构优化的光束偏转非接触原子力显微镜
DOI：
10.1063/1.1150174
复制
发表时间：
2000
影响因子：
1.6
通讯作者：
S. Morita
中科院分区：
文献类型：
--
作者：
K. Yokoyama;Taketoshi Ochi;T. Uchihashi;M. Ashino;Y. Sugawara;N. Suehira;S. Morita
介绍了一种光束偏转非接触原子力显微镜的设计和性能。利用惯性步进电机在超高真空条件下设计三维光束位置调整机构（安装激光二极管模块的滑块、带反射镜的球形转子和安装象限光电二极管的圆柱体），对光学偏转检测系统进行优化。样品和悬臂很容易在特高压下交换。仪器的性能用原子分辨的nc-AFM图像证明了各种表面，如Si(111)7×7, Cu(111), TiO2（110）和胸腺嘧啶/高取向热解石墨。
We present a design and performance of an optical beam deflection noncontact atomic force microscope (nc–AFM). The optical deflection detection system can be optimized by the three-dimensional beam position adjustment mechanism (the slider which mounts laser diode module, the spherical rotors with mirror and the cylinder which mounts quadrant photodiode) using inertial stepping motors in an ultrahigh vacuum (UHV). The samples and cantilevers are easily exchanged in UHV. The performance of the instrument is demonstrated with the atomically resolved nc-AFM images for various surfaces such as Si(111)7×7, Cu(111), TiO2(110), and thymine/highly oriented pyrolytic graphite.