Effects of AFM-based nanomachining process on aluminum surface
Effects of AFM-based nanomachining process on aluminum surface
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DOI：
10.1016/s0022-3697(02)00436-5
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发表时间：
2003-06
影响因子：
4
通讯作者：
T. Fang;Win-Jin Chang
中科院分区：
文献类型：
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作者：
T. Fang;Win-Jin Chang
用原子力显微镜(AFM)研究了纳米加工材料的表面分析。为了了解不同加工条件对表面表征的影响，进行了几种纳米加工实验。在4、8、12、16μN四种不同的外加载荷下，在涂有铝膜的硅衬底上进行了多次刻槽。结果表明，纳米机械加工后纳米级表面的平均表面粗糙度和均方根粗糙度都得到了改善。可以看出，在12μN的外加载荷下，壳体的表面更加光滑，这意味着在所有试验中，壳体的表面粗糙度是最小的。在分维分析中也可以看到同样的结果。此外，经过几次划片循环后，纳米机械加工过程中的凸起边缘效应明显。
Surface analysis of nanomachined material is studied by atomic force microscopy (AFM). To understand the influence of different machined conditions on surface characterization, several nanomachining experiments are performed. Multiple furrows are conducted on a silicon substrate coated with aluminum films under the four different applied loads, including 4, 8, 12, 16μN. Results indicate that the average surface roughness and the root-mean-square roughness of nanometer-scale surface are improved after the nanomachining process. It can be seen that a smoother surface is obtained under an applied load of 12μN, and it implies that the surface roughness of the case is minimum in all tests. The same result can also be seen in the fractal dimension analysis. In addition, the bulge edge effect on the nanomachining process is obvious after several scribing cycles.