Polymer through-hole membrane fabricated by nanoimprinting using metal mo1ds with high aspect ratios

Polymer through-hole membrane fabricated by nanoimprinting using metal mo1ds with high aspect ratios
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使用高深宽比金属模具通过纳米压印制备聚合物通孔膜

DOI:
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发表时间:
2007
期刊:
J. Vac. Sci. Tech. B 25
影响因子:
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通讯作者:
T. Yanagishita
T. Yanagishita
中科院分区:
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文献类型:
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作者:
T. Yanagishita;K. Nishio;and H. Masuda;T. Yanagishita

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