Reliability and Fatigue Analysis in Cantilever-Based MEMS Devices Operating in Harsh Environments
Reliability and Fatigue Analysis in Cantilever-Based MEMS Devices Operating in Harsh Environments
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DOI：
10.1155/2014/987847
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发表时间：
2014-01
期刊：
影响因子：
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通讯作者：
M. T. Jan;N. H. Hamid;M. Khir;K. Ashraf;andMohammad Shoaib
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文献类型：
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作者：
M. T. Jan;N. H. Hamid;M. Khir;K. Ashraf;andMohammad Shoaib
微机电系统（MEMS）是微电子学中最具发展潜力的领域之一，被誉为现代工程中最有前途的技术。MEMS可以使用微制造技术在单个硅衬底上感测、致动和集成微米和纳米尺寸的机械和机电部件。MEMS工业正处于将半导体世界转变为MEMS世界的边缘，除了其他障碍之外;这些设备的可靠性是最近研究的焦点。商业化高度依赖于这些设备的可靠性。MEMS需要高水平的可靠性。必须完全了解影响MEMS器件性能的几个技术因素、操作条件和环境效应。本研究回顾了一些主要的可靠性问题和故障机制。具体地，MEMS中的疲劳是主要的材料可靠性问题，其导致结构损伤、裂纹生长和MEMS器件的寿命测量，这是根据在不期望的操作和环境条件的影响下的疲劳裂纹累积的巴黎定律的统计分布和疲劳实现。
The microelectromechanical system (MEMS) is one of the most diversified fields of microelectronics; it is rated to be the most promising technology of modern engineering. MEMS can sense, actuate, and integrate mechanical and electromechanical components of micro- and nano sizes on a single silicon substrate using microfabrication techniques. MEMS industry is at the verge of transforming the semiconductor world into MEMS universe, apart from other hindrances; the reliability of these devices is the focal point of recent research. Commercialization is highly dependent on the reliability of these devices. MEMS requires a high level of reliability. Several technological factors, operating conditions, and environmental effects influencing the performances of MEMS devices must be completely understood. This study reviews some of the major reliability issues and failure mechanisms. Specifically, the fatigue in MEMS is a major material reliability issue resulting in structural damage, crack growth, and lifetime measurements of MEMS devices in the light of statistical distribution and fatigue implementation of Paris' law for fatigue crack accumulation under the influence of undesirable operating and environmental conditions.