Novel Proximal Group ADMM for Placement Considering Fogging and Proximity Effects
Novel Proximal Group ADMM for Placement Considering Fogging and Proximity Effects
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DOI：
10.1109/tcad.2022.3155066
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发表时间：
2022-12
影响因子：
2.9
通讯作者：
Jianli Chen;Zhipeng Huang;Ziran Zhu;Zheng Peng;Wen-xing Zhu;Yao-Wen Chang
中科院分区：
文献类型：
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作者：
Jianli Chen;Zhipeng Huang;Ziran Zhu;Zheng Peng;Wen-xing Zhu;Yao-Wen Chang
雾化和接近效应是电子束光刻中引起曝光不准确和布局畸变的两个主要因素。在本文中，我们提出了一个考虑这两个fpe的分析放置算法。我们将全局布局问题表述为具有线性约束的可分离最小化问题，其中不同的目标可以以交替的方式一个接一个地解决。然后，我们提出了一种新的近群交替方向乘子法（ADMM）来解决具有两个子问题的可分离极小化问题，其中第一个子问题（与带宽和密度相关）用最陡下降法求解，而第二个子问题（与fpe相关）用解析格式处理。证明了近群ADMM方法的全局收敛性。最后，采用fpes感知的合法化和详细的安置来合法化和改善安置结果。实验结果表明，该算法对所处理的问题是有效的。我们的算法实现了5.7%的雾化变化，6.8%的接近度变化，5.4%的运行时间，与目前的工作相比，带宽开销较小。
Fogging and proximity effects (FPEs) are two major factors that cause inaccurate exposure and layout pattern distortions in e-beam lithography. In this article, we propose an analytical placement algorithm that considers both FPEs. We formulate the global placement problem as a separable minimization problem with linear constraints, where different objectives can be tackled one by one in an alternating fashion. Then, we propose a novel proximal group alternating direction method of multipliers (ADMM) to solve the separable minimization problem with two subproblems, where the first subproblem (associated with wirelength and density) is solved by the steepest descent method without line search, and the second one (associated with the FPEs) is handled by an analytical scheme. We prove the property of global convergence of the proximal group ADMM method. Finally, the FPEs-aware legalization and detailed placement are employed to legalize and improve the placement result. The experimental results show that our algorithm is effective and efficient for the addressed problem. Our algorithm achieved 5.7% smaller fogging variation, 6.8% lower proximity variation, and 5.4% lower runtime with a minor wirelength overhead compared with the state-of-the-art work.