Foucault pendulum on a chip: angle measuring silicon MEMS gyroscope
Foucault pendulum on a chip: angle measuring silicon MEMS gyroscope
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芯片上傅科摆：角度测量硅 MEMS 陀螺仪
DOI：
10.1109/memsys.2011.5734386
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发表时间：
2011
期刊：
影响因子：
--
通讯作者：
A. Shkel
中科院分区：
文献类型：
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作者：
I. Prikhodko;S. Zotov;A. Trusov;A. Shkel
我们报告了一种真空密封角度测量硅MEMS陀螺仪的详细特性。新型陀螺仪采用完全对称、动态平衡的四重质量结构，提供了最大质量(Q)因素和共振频率和阻尼各向同性的独特组合。工作频率为2khz的真空密封SOI原型机显示，X模式和y模式的q因子几乎相同，为110万。由于刚度和阻尼的对称性，以及非常低的耗散，陀螺仪可以在基本上无限的旋转范围和带宽下进行直接角度测量。在全角模式下工作的模式匹配陀螺仪的实验表征证实了线性响应超过±450°/s的范围和100 Hz的带宽（受设置限制），消除了传统MEMS速率陀螺仪的带宽和范围限制。
We report detailed characterization of a vacuum sealed angle measuring silicon MEMS gyroscope. The new gyroscope utilizes completely symmetric, dynamically balanced quadruple mass architecture, which provides a unique combination of maximized quality (Q) factors and isotropy of both the resonant frequency and the damping. The vacuum sealed SOI prototype with a 2 kHz operational frequency demonstrated virtually identical X- and Y-mode Q-factors of 1.1 million. Due to the stiffness and damping symmetry, and very low dissipation, the gyroscope can be instrumented for direct angle measurements with fundamentally unlimited rotation range and bandwidth. Experimental characterization of the mode-matched gyroscope operated in whole-angle mode confirmed linear response in excess of ±450 °/s range and 100 Hz bandwidth (limited by the setup), eliminating both bandwidth and range constraints of conventional MEMS rate gyroscopes.