Vibration Isolation of Precision Objects
Vibration Isolation of Precision Objects
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精密物体的隔振
DOI：
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发表时间：
2006
期刊：
影响因子：
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通讯作者：
E. Rivin
中科院分区：
文献类型：
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作者：
E. Rivin
精密和振动敏感物体的隔振需求不断增加。隔振系统必须符合相互矛盾的规范，例如要求降低隔振器的刚度以获得更好的隔振，但要求提高刚度以获得更好的物体性能。最近，昂贵的主动隔离系统被用来解决这些矛盾。本文表明，提出的精密物体隔振模型以及“智能”恒固有频率（CNF）隔振器的使用大大拓宽了廉价可靠的被动隔振器的应用范围。越来越高的精度和不断减少生产缺陷的需要要求改进敏感机械与外部振动的隔离。隔振系统必须符合相互矛盾的要求，例如降低刚度以获得更好的隔振，增加刚度以获得更好的隔振对象性能。理想的物体隔振应基于物体的动态特性、物体在所有六个坐标中对振动的敏感性以及在所有六个坐标中来自地板的振动激励的频谱特性。这些是很难实现的，特别是对于典型的生产场所或研发机构，在那里有许多不同的对象，如精密生产和测量机器和设备安装在产生振动的对象旁边。一些需要隔振的器件本身就是激振器（如微光刻步进器和扫描仪）。无论如何，这种理想的方法在现实生活中是无用的。原因如下：1。安装现场的振动水平是不断变化的，因为它们是由随机因素（卡车/火车的装载和速度、随机微震振动、生产设备的工作状态等）引起的。
The need for vibration isolation of precision and vibrationsensitive objects is increasing continuously. Vibration isolation systems must comply with contradictory specifications, such as requiring reduced stiffness of isolators for better isolation, but higher stiffness for better performance of the object. Recently, expensive active isolation systems have been used to resolve these contradictions. This article shows that a proposed model for vibration isolation of precision objects together with the use of ‘smart’ constant natural frequency (CNF) isolators substantially widens the application range of inexpensive and reliable passive isolators. Greater and greater precision and a continuing need to minimize production defects call for improved isolation of sensitive machinery from external vibrations. Vibration isolation systems have to comply with contradictory requirements such as stiffness reduction for better isolation and stiffness increase for better performance of an isolated object. Ideal vibration isolation of an object should be based on the dynamic characteristics of the object, its sensitivity to vibrations in all six coordinates, and spectral characteristics of vibration excitations from the floor in all six coordinates. These are rarely attainable, especially for typical production sites or R&D establishments where numerous diverse objects, such as precision production and measuring machines and equipment are installed next to vibration producing objects. Some of those that require vibration isolation are themselves vibration exciters (e.g. microlithography steppers and scanners). Such an ideal approach would be useless for real-life situations anyway. Some reasons for this: 1. Vibration levels at installation sites are changing continuously, since they are caused by random factors (loading and speed of passing trucks/trains, random microseismic vibrations, working regimes of production equipment, etc.).