Low-Loss and Broadband Optical Coupler Based on Lensed-Top Vertically Curved Silicon Waveguide
Low-Loss and Broadband Optical Coupler Based on Lensed-Top Vertically Curved Silicon Waveguide
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基于透镜顶部垂直弯曲硅波导的低损耗宽带光耦合器
DOI：
10.1109/lpt.2019.2903233
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发表时间：
2019
影响因子：
2.6
通讯作者：
Sakakibara Youichi
中科院分区：
文献类型：
--
作者：
Atsumi Yuki;Yoshida Tomoya;Omoda Emiko;Sakakibara Youichi
高性能硅光耦合器是实现硅光子集成电路（Si-PIC）大规模商业化所必需的重要功能器件之一。在这项工作中，我们研究了每个器件长度的弯曲形状，并成功地制造了一个非常低的损耗和宽带5 μ m束斑表面光耦合器的基础上，透镜顶部的垂直弯曲的硅波导通过调整剂量条件中使用的离子注入过程。器件的耦合损耗为2.4dB，其中波导损耗约为0.5dB，在1.55 μm波段，横向极化的0.5dB损耗带宽大于220 nm。该耦合器件将极大地促进采用粗波分复用技术的Si-PIC的发展。
The high-performance silicon optical coupler is one of the significant functional devices, which will be required to enable mass commercialization of silicon photonic integrated circuits (Si-PICs). In this work, we investigated the bending shapes for each device length and have successfully fabricated a very low-loss and broadband 5-μm-beam-spot surface optical coupler based on a lensed-top vertically curved silicon waveguide by adjusting the dose conditions used in the ion implantation process. The fabricated device showed a coupling loss of 2.4 dB, which included a waveguide loss of approximately 0.5 dB and a 0.5-dB-loss bandwidth of more than 220 nm for the transverse electric polarization in the 1.55-μm wavelength band. This coupling device will greatly contribute to the progress in the development of Si-PICs using the coarse wavelength division multiplexing technique.