Effect of N doping on properties of diamond-like carbon thin films produced by RF capacitively coupled chemical vapor deposition from different precursors
Effect of N doping on properties of diamond-like carbon thin films produced by RF capacitively coupled chemical vapor deposition from different precursors
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DOI：
10.1016/j.diamond.2004.05.002
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发表时间：
2004-11
影响因子：
4.1
通讯作者：
V. Anita;T. Butuda;T. Maeda;K. Takizawa;N. Saito;O. Takai
中科院分区：
文献类型：
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作者：
V. Anita;T. Butuda;T. Maeda;K. Takizawa;N. Saito;O. Takai
