Femtosecond laser rapid prototyping of nanoshells and suspending components towards microfluidic devices.
Femtosecond laser rapid prototyping of nanoshells and suspending components towards microfluidic devices.
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DOI：
10.1039/b902159k
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发表时间：
2009-08
期刊：
影响因子：
6.1
通讯作者：
Dong Wu;Qidai Chen;L. Niu;Jian‐Nan Wang;Juan Wang;Rui Wang;Hong Xia;Hongyu Sun
中科院分区：
文献类型：
--
作者：
Dong Wu;Qidai Chen;L. Niu;Jian‐Nan Wang;Juan Wang;Rui Wang;Hong Xia;Hongyu Sun
目前，微流控研究正在采用先进的微纳米处理技术来生产功能更强大的“芯片实验室”系统。然而，双光子聚合（TPP）是一种强大的可设计微纳制造方法，但由于难以形成埋藏通道，尚未在激励领域得到应用。在这里，我们通过纳米壳的TPP原型解决了这个问题，其中使用负色调树脂SU-8是至关重要的。制造效率提高了几个数量级，再加上将可移动的微机械和光学元件集成到芯片中的前景，将使TPP成为微分析系统的一个有前途的工具。最后，在微流控通道中快速实现了长度为25微米的功能微阀，并对其“开”和“关”状态进行了测试。
Microfluidic researches are now resorting to advanced micro-nanoprocessing technologies for production of more functional "lab-on-a-chip" systems. However, two-photon polymerization (TPP), a powerful designable micro-nanofabrication approach, has not been put to use on the exciting field, largely due to the difficulties in forming buried channels. Here, we solve the problem by TPP prototyping of nanoshells, for which the usage of the negative tone resin SU-8 is found critical. The fabrication efficiency improved by orders of magnitude, together with the prospect of integration of movable micro-mechanical and optical components into the chip would make TPP a promising enabling tool for the micro-analytical systems. Finally, a 25 microm length functional microvalve in a microfluidic channel was rapidly realized and its "ON" and "OFF" states were tested.