Recrystallization and formation of spheroidal gold particles in amorphous-like AlN-TiB2-TiSi2 coatings after annealing and subsequent implantation
Recrystallization and formation of spheroidal gold particles in amorphous-like AlN-TiB2-TiSi2 coatings after annealing and subsequent implantation
复制标题
退火和后续注入后非晶态 AlN-TiB2-TiSi2 涂层中的再结晶和球状金颗粒的形成
DOI：
10.1134/s1063783416070283
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发表时间：
2016
影响因子：
0.6
通讯作者：
and A.I. Kupchishin
中科院分区：
文献类型：
--
作者：
A.D. Pogrebnjak;A.A. Dem’yanenko;V.M. Beresnev;O.V. Sobol’;O.M. Ivasishin;K. Oyoshi;Y. Takeda;H. Amekura;and A.I. Kupchishin
使用负金离子 (Au–) 束和高温退火，对包含特征尺寸为 0.8–1.0 nm 的短程有序区域的 X 射线非晶 AlN-TiB2-TiSi2 涂层结构进行了再结晶。使用高分辨率透射电子显微镜 (HRTEM) 和能量色散 X 射线光谱 (EDXS) 微分析方法进行的直接测量表明，在空气中 1300°C 的温度下进行热退火会形成纳米级 (10-15 nm) 相 AlN、AlB2、Al3O3 和 TiO2，而负离子 Au– 的离子注入会导致纳米晶破碎（尺寸减小），从而形成纳米颗粒。 2-5 nm，形成几纳米大小的球状金纳米微晶，以及由于弹道离子混合和碰撞级联而在涂层深度（近表面层）形成非晶氧化膜。
The recrystallization of the structure of an X-ray amorphous AlN–TiB2–TiSi2coating containing short-range order regions with characteristic sizes of 0.8–1.0 nm has been performed using a negative gold ion (Au–) beam and high-temperature annealing. Direct measurements using methods of high-resolution transmission electron microscopy (HRTEM) and energy-dispersive X-ray spectral (EDXS) microanalysis have demonstrated that thermal annealing at a temperature of 1300°C in air results in the formation of nanoscale (10–15 nm) phases AlN, AlB2, Al3O3, and TiO2, whereas the ion implantation of negative ions Au–leads to a fragmentation (decrease in the size) of nanograins to 2–5 nm with the formation of spheroidal gold nanocrystallites a few nanometers in size, as well as to the formation of an amorphous oxide film in the depth (near-surface layer) of the coating due to ballistic ion mixing and collision cascades.